Gallium oxide (Ga2O3)

β- Gallium oxide/Ga2O3, commonly known as gallium oxide, has been the focus of attention in the semiconductor field in recent years, representing a new chapter in the fourth generation of semiconductors. In the laboratory, researchers have continuously made remarkable breakthroughs, and their pace of mass production and commercialization is also accelerating.

Gallium oxide has good chemical and thermal stability, with a bandgap width of 4.7 to 4.9 eV, a critical breakdown field strength of 8 MV/cm (much higher than the theoretical limit of 2.5 MV/cm for SiC and 3.3 MV/cm for GaN), an electron mobility of 250 cm2/V • s, and strong transparent conductivity. Its Barigard value exceeds 3000, which is several times that of GaN and SiC materials.

These excellent properties enable gallium oxide to be applied in radiation detection sensor chips in fields such as communication, radar, aerospace, high-speed rail vehicles, and new energy vehicles. Especially in high-power, high-temperature, and high-frequency devices, gallium oxide has greater advantages over silicon carbide and gallium nitride in various aspects.

In just a few years, the manufacturing of Ga2O3 crystals has achieved rapid development, catching up with the current largest scale of SiC and GaN. In addition, the low preparation cost of epitaxial growth of large single crystal gallium oxide materials and mature epitaxial growth technology have provided strong support for the development of gallium oxide power devices.

Currently, research institutions and businesses from various countries are vying to invest and layout gallium oxide. In September 2017, gallium oxide was included in the key research and development plan by the High tech Department of the Ministry of Science and Technology; In March 2018, the Beijing Municipal Commission of Science and Technology took the lead in conducting research on cutting-edge new materials, listing gallium oxide as a key project.

In the future, with the optimization of Ga2O3 block single crystal growth costs (such as exploring different growth methods, iridium free processes, etc.) and the continuous resolution of p-type doping challenges (such as Mg SOG magnesium diffusion, P-NiO/N-Ga2O3 gallium oxide heterojunction, etc.), it is expected that gallium oxide will soon join the commercial market competing with silicon carbide and gallium nitride. Research predicts that the market size of gallium oxide power devices will begin to surpass that of gallium nitride in 2025, reaching $1.542 billion by 2030, accounting for 40% of silicon carbide and 1.56 times that of gallium nitride. Dihedral, Co., Ltd. (DHD) provides various crystal orientation and size specifications of gallium oxide (Ga2O3) single crystal substrates and epitaxial substrates according to the needs of researchers.


Applications

Radiation detection sensor chips can be applied in fields such as communication, radar, aerospace, high-speed rail vehicles, and new energy vehicles. Especially in high-power, high-temperature, and high-frequency devices, gallium oxide has greater advantages over silicon carbide and gallium nitride in many aspects.

Features

Broadband Gap: Gallium oxide has a broadband gap of approximately 4.8 to 4.9 electron volts, making it advantageous in applications such as ultraviolet photodetectors and power devices.
High temperature stability: Good high temperature stability, capable of working in environments up to 1200 degrees Celsius, making it suitable for high-temperature, high-power, and high-frequency application scenarios.
High breakdown field strength: Gallium oxide has a high breakdown field strength, making it widely used in high-voltage equipment.
Good optical performance: It has good optical transparency in a wide band range from ultraviolet to infrared.
Good chemical stability: Gallium oxide has high chemical stability at room temperature and pressure, and has good resistance to many acids and bases.
These characteristics make gallium oxide have broad application potential in fields such as power electronics, optoelectronics, photocatalysis, and gas sensors.

  • Ga2O3 single crystal substrate
    size2" and customized5mm*5mm~20mm*20mm
    Planes<001>,<100><-201>,<010>
    deviation<1° or customized deflection angle
    thickness650±50μm or customized
    conductivity typeN, semi-insulated
    Resistivity<1ω·cm or="">1x1010Ω·cm
    XRD FWHM<150arcsec
    Surface roughness Ra<0.5nm
    Gallium Oxide Epitaxial Wafer
    • Gallium oxide substrate
    size2" and customized
    Planes<001>or customized
    dopantSi, Sn, Fe
    thickness650±50μm or customized
    XRD FWHM<150arcsec
    • Gallium oxide homoepitaxial layer
    dopantUID or Si
    Carrier concentration2x1016~1x1018
    thickness5~20μm
    Gallium oxide heteroepitaxial wafer I (sapphire substrate)
     • High quality sapphire substrate
     • Gallium epitaxial layer
     Doping agent Si
     Carrier concentration 2x1016~1x1018
     Thickness 0.2-2μm


    Gallium oxide heteroepitaxial wafer II (sapphire substrate)
     • High quality sapphire substrate
     • Gallium epitaxial layer
     DoppingNone
     ResistivityHigh
     FWHM<0.25°
     Ra.
    <1nm