Epitaxial silicon wafer

Silicon epitaxial wafers are commonly used in the field of semiconductor manufacturing, especially in integrated circuit manufacturing. Through epitaxial technology, different silicon layers can be achieved on the same silicon wafer, each with different electrical characteristics. This helps to integrate devices with different functions on the same chip, improving integration and performance.

Applications

Silicon epitaxial wafers have various applications in the semiconductor industry, mainly related to integrated circuit manufacturing and optoelectronic devices. The following are the main application areas of silicon epitaxial wafers:
1. Integrated circuit manufacturing: Silicon epitaxial wafers are widely used in the manufacturing of integrated circuits. By epitaxial different layers of silicon on the same silicon wafer, manufacturers can create complex semiconductor devices and integrated circuits. This helps to improve the integration, performance, and power efficiency of the chip.
2. Optoelectronic devices: Silicon epitaxial wafers are also used to manufacture optoelectronic devices, such as photodiodes, photovoltaic cells, and lasers. In these applications, silicon epitaxial wafers provide high-quality, high crystal purity silicon materials, which help improve the performance and stability of devices.
3. Sensor manufacturing: Some sensors, especially those related to semiconductor technology, may also be manufactured using silicon epitaxial wafers. These sensors can be used to measure physical quantities such as temperature, pressure, and light intensity.
4. Microelectronics research: In the research and development of new microelectronics devices and technologies, silicon epitaxial wafers are an important experimental tool. Researchers can use epitaxial processes to explore new semiconductor materials, structures, and device designs.
5. Infrared detectors: Some infrared detectors are manufactured using silicon epitaxial wafers for high sensitivity detection within the infrared spectral range.
Overall, the application of silicon epitaxial wafers in the fields of semiconductors and optoelectronics provides key support for the manufacturing and performance of modern electronic devices, promoting continuous technological progress.

Features

Basic silicon wafer substrate: Select a basic silicon wafer as the substrate. This silicon wafer typically has the required lattice structure and orientation to support subsequent silicon epitaxial growth.
Epitaxy process: Epitaxy is a technique used to deposit new crystal layers on the surface of a crystal. In the preparation of silicon epitaxial wafers, a new layer of silicon single crystal is grown by depositing silicon material on the base silicon wafer.
Growth temperature and atmosphere control: During the epitaxial process, it is necessary to control the temperature and atmosphere to ensure that the newly grown silicon layer has the required crystal quality and structure. This is to avoid crystal defects and ensure the quality and performance of silicon wafers.
Doping and other treatments: During the preparation process of silicon epitaxial wafers, the electrical properties of the silicon wafer can be adjusted through doping and other treatments. This is to give silicon wafers specific electrical properties to meet the needs of specific applications.

  • Epitaxial layer doping

    Parameters

    Si-Si epitaxial wafer

    Sapphire substrate silicon epitaxial wafer

    Diameter

    76, 100, 150, 200 mm

    76, 100, 150 mm

    Substrate crystal orientation

    (111), (100)

    R-face

    Substrate doping

    Antimony, Boron, Arsenic

    -

    Thickness(μm)

    1,0 – 200

    0,3 – 2,0

    Phosphorus, Boron, Arsenic

    Phosphorus, Boron


    Epitaxial layer resistivity, Ω.cm

    N-type2

    P-type1


    0,005 – 1500

    0,005 – 1500


    acc. to spec.

    1,0 - 0,01

    Multilayer output

    To the fourth layer

    1 layer

    Buried epitaxy

    To the third layer

    (p+, n+) 

    -